Micro and Smart Systems, As per AICTE

G.K. Ananthasuresh, K.J. Vinoy, S. Gopalakrishnan, K.N. Bhat, V.K. Aatre

ISBN: 9788126520701

428 pages

INR 759


This book essentially deals with the basics of microsystem technology and is intended principally as a textbook at the undergraduate level; however, it can also be used as a background book at the postgraduate level. The book makes an effort to provide an introduction to smart materials and systems. The authors present the material without assuming much prior disciplinary background. The aim of this book is to present adequate modeling details so that readers can appreciate the analysis involved in microsystems (and to some extent, smart systems) and thereby enable them to get an in-depth understanding about simulation and design.

1 Introduction

    1. Why Miniaturization?
    2. Microsystems versus MEMS
    3. Why Microfabrication?
    4. Smart Materials, Structures and Systems
    5. Integrated Microsystems
    6. Applications of Smart Materials and Microsystems
    7. Summary
  • Micro Sensors, Actuators, Systems and Smart Materials: An Overview
      1. Silicon Capacitive Accelerometer
      2. Piezoresistive Pressure Sensor
      3. Conductometric Gas Sensor
      4. An Electrostatic Comb-Drive
      5. A Magnetic Microrelay
      6. Portable Blood Analyzer
      7. Piezoelectric Inkjet Print Head
      8. Micromirror Array for Video Projection
      9. Smart Materials and Systems

    2.10 Summary


    1. Micromachining Technologies
      1. Silicon as a Material for Micromachining
      2. Thin-Film Deposition
      3. Lithography
      4. Etching
      5. Silicon Micromachining
      6. Specialized Materials for Microsystems
      7. Advanced Processes for Microfabrication
      8. Summary

    4. Modeling of Solids in Microsystems

    4.1 The Simplest Deformable Element: A Bar

    4.2 Transversely Deformable Element: A beam

    4.3 Energy Methods for Elastic Bodies

    4.4 Examples and Problems

    4.5 Heterogeneous Layered Beams

    4.6 Bimorph Effect

    4.7 Residual Stresses and Stress Gradients

    4.8 Poisson Effect and the Anticlastic Curvature of Beams

    4.9 Torsion of Beams and Shear Stresses

    4.10 Dealing with Large Displacements

    4.11 In-Plane Stresses

    4.12 Summary


    5 Finite Element Method

    5.1 Need for Numerical Methods for Solution of Equations

    5.2 Variational Principles

    5.3 Weak Form of the Governing Differential Equation

    5.4 Finite Element Method

    5.5 Numerical Examples

    5.6 Finite Element Model for Structures with Piezoelectric Sensors and Actuators

    5.7 Analysis of a Piezoelectric Bimorph Cantilever Beam

    5.8 Summary


    6 Modeling of Coupled Electromechanical Systems

    6.1 Electrostatics

    6.2 Coupled Electromechanics: Statics

    6.3 Coupled Electromechanics: Stability and Pull-In Phenomenon

    6.4 Coupled Electromechanics: Dynamics

    6.5 Squeezed Film Effects in Electromechanics

    6.6 Summary


    7 Electronics Circuits and Control for Micro and Smart Systems

    7.1 Semiconductor Devices

    7.2 Electronics Amplifiers

    7.3 Practical Signal Conditioning Circuits for Microsystems

    7.4 Circuits for Conditioning Sensed Signals

    7.5 Introduction to Control Theory

    7.6 Implementation of Controllers

    7.7 Summary


    8 Integration of Micro and Smart Systems

    8.1 Integration of Microsystems and Microelectronics

    8.2 Microsystems Packaging

    8.3 Case Studies of Integrated Microsystems

    8.4 Case Study of a Smart Structure in Vibration Control

    8.5 Summary


    9 Scaling Effects in Microsystems

    9.1 Scaling in the Mechanical Domain

    9.2 Scaling in the Electrostatic Domain

    9.3 Scaling in the Magnetic Domain

    9.4 Scaling in the Thermal Domain

    9.5 Scaling in Diffusion

    9.6 Scaling in Fluids

    9.7 Scaling Effects in the Optical Domain

    9.8 Scaling in Biochemical Phenomena

    9.9 Summary


    Further Reading




    About the Authors